Processes such as ablation, erosion and corrosion generally create roughness patterns on solid surfaces. Despite the randomness of this phenomenon, some patterns can be described mathematically by studying statistically the mechanisms behind them. This paper reports an experimental study on the temporal evolution of the roughness development of polymer surfaces exposed to argon non-thermal plasma under reduced pressure of 5 mbar and 65 W of applied power. The substrates studied were polypropylene, high density polyethylene, polyamide-6 and poly(ether ether)ketone. The mean roughness data as well as the saturation roughness values showed differences between polyolefin and polymers containing heteroatoms and notably the dependence of the etching on the packing density of the polymer chains. The plasma-etched surfaces were described statistically as self-affine surfaces using scaling law analysis, exhibiting roughness exponents of α ca.0.73 ± 0.2 and growth exponents of β ca. 1.0 ± 0.1. The roughness increases and decreases successively during treatment although presenting a general linear behavior in a non-monotonous way, as a function of time. The models for the shadowing and redistribution of active species can be complemented with the transient crosslinking model of the observed flattening stages.